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Colinge, Jean-Pierre.

Silicon-on-insulator technology materials to VLSI / [[Book] :] by Jean-Pierre Colinge. - 3rd ed. - Boston : Kluwer Academic Publishers, 2004. - x, 366 p. : ill. ; 24 cm.

Includes bibliographical references and index.

All Ages.

ISBN: 1402077734 (alk. paper)

LCCN: 2004041379

Subjects--Topical Terms:
Semiconductors.
Silicon-on-insulator technology.
Integrated circuits--Very large scale integration--Materials.

LC Class. No.: TK7871.85 / .C578 2004

Dewey Class. No.: 621.38152