Ananthasuresh, G. K.

Optimal synthesis methods for MEMS [Book /] G.K. Ananthasuresh. - 1st.ed. - Boston : Kluwer Academic Publishers, 2003. - 320 p. : ill. ; 24 cm. - The Kluwer international series in microsystems .

Includes bibliographical references and index.

All age.

1402076207

2003055884


Microelectromechanical systems--Computer simulation.

TK7875 / .A52 2003

621.381
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