Franssila, Sami.

Introduction to microfabrication [Book /] Sami Franssila. - 1st.ed. - Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, 2004. - xvii, 402 p. : ill. ; 26 cm.

Includes bibliographical references and index.

All age.

0470851066 0470851066 (pbk.)

2004004940


Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.

TK7875 / .F73 2004

621.3

/ FI
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