Franssila, Sami.
Introduction to microfabrication [Book /] Sami Franssila. - 1st.ed. - Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, 2004. - xvii, 402 p. : ill. ; 26 cm.
Includes bibliographical references and index.
All age.
0470851066 0470851066 (pbk.)
2004004940
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
TK7875 / .F73 2004
621.3
/ FI
Introduction to microfabrication [Book /] Sami Franssila. - 1st.ed. - Chichester, West Sussex, England ; Hoboken, NJ : J. Wiley, 2004. - xvii, 402 p. : ill. ; 26 cm.
Includes bibliographical references and index.
All age.
0470851066 0470851066 (pbk.)
2004004940
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.
TK7875 / .F73 2004
621.3
/ FI