Casper , Lawrence A.
Microelectronics processing Inorganic materials characterization / [Book :] Lawrence A. .Casper. - Washington ,dc : American Chemical Society, 1986 . - 443 p. : ill ; 23 cm . - ACS symposium series 295 . .
includes index .
All Ages.
0841209340
Microelectronics .
621.381'7
/ CM
Microelectronics processing Inorganic materials characterization / [Book :] Lawrence A. .Casper. - Washington ,dc : American Chemical Society, 1986 . - 443 p. : ill ; 23 cm . - ACS symposium series 295 . .
includes index .
All Ages.
0841209340
Microelectronics .
621.381'7
/ CM