Thompson,Larry F.
Polymers for microelectronics resists and dielectrics / [Book :] Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. - Washington, DC : American Chemical Society, 1994. - xii, 571 p. : ill. ; 24 cm. - ACS symposium series, 0097-6156 ; 537 ; .
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
Includes bibliographical references and indexes.
All Ages.
0841227217
93033955
Microelectronics--Materials--Congresses.
Polymers--Congresses.
TK7871.15.P6 / P628 1994
621.381531
/ T P
Polymers for microelectronics resists and dielectrics / [Book :] Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. - Washington, DC : American Chemical Society, 1994. - xii, 571 p. : ill. ; 24 cm. - ACS symposium series, 0097-6156 ; 537 ; .
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
Includes bibliographical references and indexes.
All Ages.
0841227217
93033955
Microelectronics--Materials--Congresses.
Polymers--Congresses.
TK7871.15.P6 / P628 1994
621.381531
/ T P