Thompson,Larry F.

Polymers for microelectronics resists and dielectrics / [Book :] Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. - Washington, DC : American Chemical Society, 1994. - xii, 571 p. : ill. ; 24 cm. - ACS symposium series, 0097-6156 ; 537 ; .

"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".

Includes bibliographical references and indexes.

All Ages.

0841227217

93033955


Microelectronics--Materials--Congresses.
Polymers--Congresses.

TK7871.15.P6 / P628 1994

621.381531

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