Abdel Rehiem , Abdel Ati . <br/><br/>
Special study plasma etching techniques & application in microelectronics industry .  [[Thesis] /] 
Abdel Ati Abdel Rehiem  . 
 -  faculty of engineering,  1995. 
 - 62 p :  ill ;  30 cm. 
<br/><br/>Thesis (M.S ) -- Alexandria university, 1995. 
<br/><br/>includes bibliogrphic  referance( 62). 
<br/><br/> All age. 
<br/><br/><label>Subjects--Topical Terms: </label><br/>microelectronics .
<br/><br/><label>Dewey Class. No.: </label>621.381 
<br/><br/><label>National Library of Medicine Call No.: </label>621.381  / RS