Silicon-on-insulator technology materials to VLSI / [[Book] :]
by Jean-Pierre Colinge.
- 3rd ed.
- Boston : Kluwer Academic Publishers, 2004.
- x, 366 p. : ill. ; 24 cm.
Includes bibliographical references and index.
All Ages.
1402077734 (alk. paper)
2004041379
Semiconductors. Silicon-on-insulator technology. Integrated circuits--Very large scale integration--Materials.