Ananthasuresh, G. K. Optimal synthesis methods for MEMS [Book /] G.K. Ananthasuresh. - 1st.ed. - Boston : Kluwer Academic Publishers, 2003. - 320 p. : ill. ; 24 cm. - The Kluwer international series in microsystems . Includes bibliographical references and index. All age. ISBN: 1402076207 LCCN: 2003055884 Subjects--Topical Terms: Microelectromechanical systems--Computer simulation. LC Class. No.: TK7875 / .A52 2003 Dewey Class. No.: 621.381