Kaltenbacher, Manfred, 1968- Numerical simulation of mechatronic sensors and actuators [Book /] Manfred Kaltenbacher. - 1st.ed. - Berlin ; New York : Springer, 2004. - xv, 311 p. : ill. ; 24 cm. Includes bibliographical references (p. [299]-306) and index. All age. ISBN: 354020458X LCCN: 2004045237 Subjects--Topical Terms: Microelectromechanical systems.Mechatronics. LC Class. No.: TK7875 / .K35 2004 Dewey Class. No.: 621.0151825 National Library of Medicine Call No.: 621.0151825