Casper , Lawrence A. Microelectronics processing Inorganic materials characterization / [Book :] Lawrence A. .Casper. - Washington ,dc : American Chemical Society, 1986 . - 443 p. : ill ; 23 cm . - ACS symposium series 295 . . includes index . All Ages. ISBN: 0841209340 Subjects--Topical Terms: Microelectronics . Dewey Class. No.: 621.381'7 National Library of Medicine Call No.: / CM