Casper , Lawrence A.

Microelectronics processing Inorganic materials characterization / [Book :] Lawrence A. .Casper. - Washington ,dc : American Chemical Society, 1986 . - 443 p. : ill ; 23 cm . - ACS symposium series 295 . .

includes index .

All Ages.

0841209340


Microelectronics .

621.381'7

/ CM