Polymers for microelectronics resists and dielectrics / [Book :]
Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
- Washington, DC : American Chemical Society, 1994.
- xii, 571 p. : ill. ; 24 cm.
- ACS symposium series, 0097-6156 ; 537 ; .
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".