Thompson,Larry F. <br/><br/>
Polymers for microelectronics  resists and dielectrics /  [Book :] 
Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. 
 - Washington, DC :  American Chemical Society,  1994. 
 - xii, 571 p. :  ill. ;  24 cm. 
 - ACS symposium series,  0097-6156 ;  537 ; .
<br/><br/> "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.". 
<br/><br/>Includes bibliographical references and indexes. 
<br/><br/> All Ages. 
<br/><br/><label>ISBN: </label>0841227217  
<br/><br/><label>LCCN: </label>93033955  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Materials--Congresses.<br/>Polymers--Congresses.
<br/><br/><label>LC Class. No.: </label>TK7871.15.P6  / P628 1994 
<br/><br/><label>Dewey Class. No.: </label>621.381531 
<br/><br/><label>National Library of Medicine Call No.: </label> / T P