Polymers for microelectronics resists and dielectrics - Thompson,Larry F.; Tagawa, Seiichi; Thompson, L. F., 1944-; Willson, C. G. (C. Grant), 1939-; American Chemical Society. Division of Polymeric Materials: Science and Engineering; American Chemical Society. Meeting 1992 : San Francisco, Calif.) (Washington, DC : American Chemical Society, 1994)
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
Includes bibliographical references and indexes.
All Ages.
Keywords: Microelectronics -- Materials -- Congresses; Polymers -- Congresses