| 000 | 00788nam a2200253 a 4500 | ||
|---|---|---|---|
| 005 | 20150623171637.0 | ||
| 007 | a| ||||| | ||
| 008 | 070522s1995 000 0 eng d | ||
| 060 |
_a621.381 _bRS |
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| 082 | _a621.381 | ||
| 084 |
_a621.381 _bRS |
||
| 100 | 1 | _aAbdel Rehiem , Abdel Ati . | |
| 245 | 1 | 0 |
_aSpecial study plasma etching techniques & application in microelectronics industry . _h[[Thesis] /] _cAbdel Ati Abdel Rehiem . |
| 260 |
_bfaculty of engineering, _c1995. |
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| 300 |
_a62 p : _bill ; _c30 cm. |
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| 502 | _aThesis (M.S ) -- Alexandria university, 1995. | ||
| 504 | _aincludes bibliogrphic referance( 62). | ||
| 521 | _aAll age. | ||
| 650 | 0 | _amicroelectronics . | |
| 700 | _aAbdel Rehiem , Abdel Ati . | ||
| 001 | 0000055900 | ||
| 003 | 0000 | ||
| 942 | _cTHE | ||
| 999 |
_c37650 _d37650 |
||