000 00939cam a22003014a 4500
005 20150706003855.0
008 040108s2004 maua b 001 0 eng
010 _a 2004041379
020 _a1402077734 (alk. paper)
040 _aDLC
_beng
_cDLC
_dDLC
042 _apcc
050 0 0 _aTK7871.85
_b.C578 2004
082 0 0 _a621.38152
_222
084 _a621.38152
_bCS
100 1 _aColinge, Jean-Pierre.
245 1 0 _aSilicon-on-insulator technology
_h[[Book] :]
_bmaterials to VLSI /
_cby Jean-Pierre Colinge.
250 _a3rd ed.
260 _aBoston :
_bKluwer Academic Publishers,
_c2004.
300 _ax, 366 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index.
521 _aAll Ages.
650 0 _aSemiconductors.
650 0 _aSilicon-on-insulator technology.
650 0 _aIntegrated circuits
_xVery large scale integration
_xMaterials.
001 0000025123
003 0000
942 _cBK
999 _c47350
_d47350