000 00863cam a22002894a 4500
005 20150706003855.0
008 030828s2003 maua b 001 0 eng
010 _a 2003055884
020 _a1402076207
040 _aDLC
_beng
_cDLC
_dDLC
042 _apcc
050 0 0 _aTK7875
_b.A52 2003
082 0 0 _a621.381
_222
084 _a621.381
_bAO
100 1 _aAnanthasuresh, G. K.
245 1 0 _aOptimal synthesis methods for MEMS
_h[Book /]
_cG.K. Ananthasuresh.
250 _a1st.ed.
260 _aBoston :
_bKluwer Academic Publishers,
_c2003.
300 _a320 p. :
_bill. ;
_c24 cm.
440 4 _aThe Kluwer international series in microsystems
504 _aIncludes bibliographical references and index.
521 _aAll age.
650 0 _aMicroelectromechanical systems
_xComputer simulation.
001 0000025414
003 0000
942 _cBK
999 _c47422
_d47422