| 000 | 00863cam a22002894a 4500 | ||
|---|---|---|---|
| 005 | 20150706003855.0 | ||
| 008 | 030828s2003 maua b 001 0 eng | ||
| 010 | _a 2003055884 | ||
| 020 | _a1402076207 | ||
| 040 |
_aDLC _beng _cDLC _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.A52 2003 |
| 082 | 0 | 0 |
_a621.381 _222 |
| 084 |
_a621.381 _bAO |
||
| 100 | 1 | _aAnanthasuresh, G. K. | |
| 245 | 1 | 0 |
_aOptimal synthesis methods for MEMS _h[Book /] _cG.K. Ananthasuresh. |
| 250 | _a1st.ed. | ||
| 260 |
_aBoston : _bKluwer Academic Publishers, _c2003. |
||
| 300 |
_a320 p. : _bill. ; _c24 cm. |
||
| 440 | 4 | _aThe Kluwer international series in microsystems | |
| 504 | _aIncludes bibliographical references and index. | ||
| 521 | _aAll age. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xComputer simulation. |
|
| 001 | 0000025414 | ||
| 003 | 0000 | ||
| 942 | _cBK | ||
| 999 |
_c47422 _d47422 |
||