000 | 00863cam a22002894a 4500 | ||
---|---|---|---|
005 | 20150706003855.0 | ||
008 | 030828s2003 maua b 001 0 eng | ||
010 | _a 2003055884 | ||
020 | _a1402076207 | ||
040 |
_aDLC _beng _cDLC _dDLC |
||
042 | _apcc | ||
050 | 0 | 0 |
_aTK7875 _b.A52 2003 |
082 | 0 | 0 |
_a621.381 _222 |
084 |
_a621.381 _bAO |
||
100 | 1 | _aAnanthasuresh, G. K. | |
245 | 1 | 0 |
_aOptimal synthesis methods for MEMS _h[Book /] _cG.K. Ananthasuresh. |
250 | _a1st.ed. | ||
260 |
_aBoston : _bKluwer Academic Publishers, _c2003. |
||
300 |
_a320 p. : _bill. ; _c24 cm. |
||
440 | 4 | _aThe Kluwer international series in microsystems | |
504 | _aIncludes bibliographical references and index. | ||
521 | _aAll age. | ||
650 | 0 |
_aMicroelectromechanical systems _xComputer simulation. |
|
001 | 0000025414 | ||
003 | 0000 | ||
942 | _cBK | ||
999 |
_c47422 _d47422 |