| 000 | 01126pam a22003494a 4500 | ||
|---|---|---|---|
| 005 | 20150706003916.0 | ||
| 008 | 040301s2004 enka b 001 0 eng | ||
| 010 | _a 2004004940 | ||
| 020 | _a0470851066 | ||
| 020 | _a0470851066 (pbk.) | ||
| 040 |
_aDLC _beng _cDLC _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.F73 2004 |
| 060 | _bFI | ||
| 082 | 0 | 0 |
_a621.3 _222 |
| 084 |
_a621.3 _bFI |
||
| 100 | 1 | _aFranssila, Sami. | |
| 245 | 1 | 0 |
_aIntroduction to microfabrication _h[Book /] _cSami Franssila. |
| 250 | _a1st.ed. | ||
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ : _bJ. Wiley, _c2004. |
||
| 300 |
_axvii, 402 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 521 | _aAll age. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 650 | 0 | _aElectronic apparatus and appliances. | |
| 650 | 0 | _aMicrofabrication. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley041/2004004940.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley041/2004004940.html |
| 001 | 0000047900 | ||
| 003 | 0000 | ||
| 942 | _cBK | ||
| 999 |
_c49101 _d49101 |
||