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| 008 | 070221s1986 000 0 eng d | ||
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| 060 | _bCM | ||
| 082 | _a621.381'7 | ||
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_a621.381'7 _bCM |
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| 100 | 1 | _aCasper , Lawrence A. | |
| 245 | 1 | 0 |
_aMicroelectronics processing _h[Book :] _bInorganic materials characterization / _c Lawrence A. .Casper. |
| 260 |
_aWashington ,dc : _bAmerican Chemical Society, _c1986 . |
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| 300 |
_a443 p. : _bill ; _c23 cm . |
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| 440 | 0 | _aACS symposium series 295 . | |
| 500 | _aincludes index . | ||
| 521 | _aAll Ages. | ||
| 650 | 0 | _aMicroelectronics . | |
| 700 | 1 | _alawrence a .casper . | |
| 001 | 0000048150 | ||
| 003 | 0000 | ||
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_c56273 _d56273 |
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