000 | 02012cam a2200481 a 4500 | ||
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005 | 20151018154217.0 | ||
008 | 930816s1994 dcua b 001 0 eng | ||
010 | _a 93033955 | ||
020 | _a0841227217 | ||
040 |
_aDLC _beng _cDLC _dDLC |
||
050 | 0 | 0 |
_aTK7871.15.P6 _bP628 1994 |
060 | _bT P | ||
082 | 0 | 0 |
_a621.381531 _220 |
084 |
_a621.381531 _bT P |
||
100 | 1 | _aThompson,Larry F. | |
245 | 1 | 0 |
_aPolymers for microelectronics _h[Book :] _bresists and dielectrics / _cLarry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor. |
260 |
_aWashington, DC : _bAmerican Chemical Society, _c1994. |
||
300 |
_axii, 571 p. : _bill. ; _c24 cm. |
||
440 | 0 |
_aACS symposium series, _x537 ; _v0097-6156 ; |
|
500 | _a"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.". | ||
504 | _aIncludes bibliographical references and indexes. | ||
521 | _aAll Ages. | ||
650 | 0 |
_aMicroelectronics _xMaterials _xCongresses. |
|
650 | 0 |
_aPolymers _xCongresses. |
|
700 | 1 | _aTagawa, Seiichi. | |
700 | 1 |
_aThompson, L. F., _d1944- |
|
700 | 1 |
_aWillson, C. G. _q(C. Grant), _d1939- |
|
710 | 2 |
_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering. |
|
710 | 2 |
_aAmerican Chemical Society. _bMeeting _n(203rd : _d1992 : _cSan Francisco, Calif.) |
|
856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-d.html |
856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-t.html |
900 | 1 | _aThompson, Larry F. | |
990 | 1 | 0 |
_a91001ab _b71001ab |
990 | 1 | 0 |
_a91002andc _b71002abndc |
990 | 1 | 0 |
_a90001a _b70002ad |
001 | 0000048185 | ||
003 | 0000 | ||
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999 |
_c56296 _d56296 |