000			02012cam a2200481 a 4500
005			20151018154217.0
008			930816s1994 dcua b 001 0 eng
010			_a 93033955
020			_a0841227217
040			_aDLC _beng _cDLC _dDLC
050	0	0	_aTK7871.15.P6 _bP628 1994
060			_bT P
082	0	0	_a621.381531 _220
084			_a621.381531 _bT P
100	1		_aThompson,Larry F.
245	1	0	_aPolymers for microelectronics _h[Book :] _bresists and dielectrics / _cLarry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
260			_aWashington, DC : _bAmerican Chemical Society, _c1994.
300			_axii, 571 p. : _bill. ; _c24 cm.
440		0	_aACS symposium series, _x537 ; _v0097-6156 ;
500			_a"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
504			_aIncludes bibliographical references and indexes.
521			_aAll Ages.
650		0	_aMicroelectronics _xMaterials _xCongresses.
650		0	_aPolymers _xCongresses.
700	1		_aTagawa, Seiichi.
700	1		_aThompson, L. F., _d1944-
700	1		_aWillson, C. G. _q(C. Grant), _d1939-
710	2		_aAmerican Chemical Society. _bDivision of Polymeric Materials: Science and Engineering.
710	2		_aAmerican Chemical Society. _bMeeting _n(203rd : _d1992 : _cSan Francisco, Calif.)
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-d.html
856	4	1	_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-t.html
900	1		_aThompson, Larry F.
990	1	0	_a91001ab _b71001ab
990	1	0	_a91002andc _b71002abndc
990	1	0	_a90001a _b70002ad
001			0000048185
003			0000
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999			_c56296 _d56296