000 02012cam a2200481 a 4500
005 20151018154217.0
008 930816s1994 dcua b 001 0 eng
010 _a 93033955
020 _a0841227217
040 _aDLC
_beng
_cDLC
_dDLC
050 0 0 _aTK7871.15.P6
_bP628 1994
060 _bT P
082 0 0 _a621.381531
_220
084 _a621.381531
_bT P
100 1 _aThompson,Larry F.
245 1 0 _aPolymers for microelectronics
_h[Book :]
_bresists and dielectrics /
_cLarry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.
260 _aWashington, DC :
_bAmerican Chemical Society,
_c1994.
300 _axii, 571 p. :
_bill. ;
_c24 cm.
440 0 _aACS symposium series,
_x537 ;
_v0097-6156 ;
500 _a"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.".
504 _aIncludes bibliographical references and indexes.
521 _aAll Ages.
650 0 _aMicroelectronics
_xMaterials
_xCongresses.
650 0 _aPolymers
_xCongresses.
700 1 _aTagawa, Seiichi.
700 1 _aThompson, L. F.,
_d1944-
700 1 _aWillson, C. G.
_q(C. Grant),
_d1939-
710 2 _aAmerican Chemical Society.
_bDivision of Polymeric Materials: Science and Engineering.
710 2 _aAmerican Chemical Society.
_bMeeting
_n(203rd :
_d1992 :
_cSan Francisco, Calif.)
856 4 2 _3Publisher description
_uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-d.html
856 4 1 _3Table of contents only
_uhttp://www.loc.gov/catdir/enhancements/fy0605/93033955-t.html
900 1 _aThompson, Larry F.
990 1 0 _a91001ab
_b71001ab
990 1 0 _a91002andc
_b71002abndc
990 1 0 _a90001a
_b70002ad
001 0000048185
003 0000
942 _cBK
942 _cBK
942 _cBK
942 _cBK
942 _cBK
999 _c56296
_d56296