SOUL Catalog فهرس المكتبة المركزية لجامعة 6 أكتوبر

Einfache Ansicht MARC ISBD

Abdel Rehiem , Abdel Ati .

Special study plasma etching techniques & application in microelectronics industry . [[Thesis] /] Abdel Ati Abdel Rehiem . - faculty of engineering, 1995. - 62 p : ill ; 30 cm.

Thesis (M.S ) -- Alexandria university, 1995.

includes bibliogrphic referance( 62).

All age.

Subjects--Topical Terms:
microelectronics .

Dewey Class. No.: 621.381

National Library of Medicine Call No.: 621.381 / RS