Special study plasma etching techniques & application in microelectronics industry . (Titelsatznr. 37650)

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000 -LEADER
fixed length control field 00788nam a2200253 a 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20150623171637.0
007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION
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008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 070522s1995 000 0 eng d
060 ## - NATIONAL LIBRARY OF MEDICINE CALL NUMBER
Classification number 621.381
Item number RS
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
084 ## - OTHER CLASSIFICATION NUMBER
Classification number 621.381
Item number RS
001 - CONTROL NUMBER
control field 0000055900
003 - CONTROL NUMBER IDENTIFIER
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100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Abdel Rehiem , Abdel Ati .
245 10 - TITLE STATEMENT
Title Special study plasma etching techniques & application in microelectronics industry .
Medium [[Thesis] /]
Statement of responsibility, etc. Abdel Ati Abdel Rehiem .
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Name of publisher, distributor, etc. faculty of engineering,
Date of publication, distribution, etc. 1995.
300 ## - PHYSICAL DESCRIPTION
Extent 62 p :
Other physical details ill ;
Dimensions 30 cm.
502 ## - DISSERTATION NOTE
Dissertation note Thesis (M.S ) -- Alexandria university, 1995.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc includes bibliogrphic referance( 62).
521 ## - TARGET AUDIENCE NOTE
Target audience note All age.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element microelectronics .
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Abdel Rehiem , Abdel Ati .
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Theses
Exemplare
Withdrawn status Lost status Damaged status Not for loan Permanent Location Current Location Shelving location Date acquired Cost, normal purchase price Full call number Barcode Date last seen Copy number Price effective from Koha item type
        6october 6october 1208 2007-08-09 0.00 621.381 RS SOULE208TH0445 2021-08-25 1 2015-06-23 Theses
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